Technique for preparing defect-free spray coated resist film on three-dimensional micro-electromechanical systems

Vijay Kumar Singh, Minoru Sasaki, Jong Hyeong Song, Kazuhiro Hane

研究成果: Article査読

16 被引用数 (Scopus)

抄録

Microstructures with high aspect ratio have been fabricated in micro-electromechanical systems (MEMS). The fundamental structures are relatively simple, since the fabrication process relies on planar photolithography. Spray coating of the photoresist is expected to become a new photolithography method for realizing real three-dimensional microstructures. However, as-deposited resist films have pinholes, particularly in the deep regions. This poses limitations to photolithography. Therefore, a new technique is introduced for removing pinholes by means of the migration of resist material on sample surfaces. Thinner vapor assists the migration of resist, generating the driving force of surface tension. The resist material accumulates in the regions with high pinhole density. Consequently, the pinholes are filled efficiently. This effect comes at the cost of thinning the resist coverage in convex corners of a cavity. The removal of pinholes and the decrease of resist film coverage at convex corners may be balanced.

本文言語English
ページ(範囲)2016-2020
ページ数5
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
44
4 A
DOI
出版ステータスPublished - 2005 4 1

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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