TY - JOUR
T1 - Tapping mode scanning capacitance microscopy
T2 - Micromachining and Imaging
AU - Goto, Kazuya
AU - Hane, Kazuhiro
PY - 1997/12/1
Y1 - 1997/12/1
N2 - Tapping mode scanning capacitance microscopy is a new technique to study local capacitances. It is a combination of the tapping mode scanning force microscopy and the scanning capacitance microscopy. With the tapping motion of the tip, tip-sample distance is accurately regulated. In addition, topographic images are simultaneously obtained together with the capacitive images. In this paper, feasibility of the quantitative capacitance determination is described. Experimental results with a silicon nitride film are compared with the theoretical curve. The effective electrode area (lateral resolution) and the tip-sample capacitance were calculated.
AB - Tapping mode scanning capacitance microscopy is a new technique to study local capacitances. It is a combination of the tapping mode scanning force microscopy and the scanning capacitance microscopy. With the tapping motion of the tip, tip-sample distance is accurately regulated. In addition, topographic images are simultaneously obtained together with the capacitive images. In this paper, feasibility of the quantitative capacitance determination is described. Experimental results with a silicon nitride film are compared with the theoretical curve. The effective electrode area (lateral resolution) and the tip-sample capacitance were calculated.
KW - Capacitance microscopy
KW - Capacitance modulation
KW - Dielectric thin film
KW - Quantitative capacitance measurement
KW - Tapping mode force microscopy
KW - Tip-sample distance
UR - http://www.scopus.com/inward/record.url?scp=1542420152&partnerID=8YFLogxK
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U2 - 10.1117/12.271216
DO - 10.1117/12.271216
M3 - Conference article
AN - SCOPUS:1542420152
SN - 0277-786X
VL - 3009
SP - 84
EP - 91
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
Y2 - 13 February 1997 through 13 February 1997
ER -