Tapping mode scanning capacitance microscopy: Feasibility of quantitative capacitance measurement

Kazuya Goto, Kazuhiro Hane

研究成果: Conference article査読

1 被引用数 (Scopus)

抄録

Tapping mode scanning capacitance microscopy is a new technique to study local capacitances. It is a combination of the tapping mode scanning force microscopy and the scanning capacitance microscopy. With the tapping motion of the tip, tip-sample distance is accurately regulated. In addition, topographic images are simultaneously obtained together with the capacitive images. In this paper, feasibility of the quantitative capacitance determination is described. Experimental results with a silicon nitride film are compared with the theoretical curve. The effective electrode area (lateral resolution) and the tip-sample capacitance were calculated.

本文言語English
ページ(範囲)84-91
ページ数8
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
3009
DOI
出版ステータスPublished - 1997 12 1
イベントMicromachining and Imaging - San Jose, CA, United States
継続期間: 1997 2 131997 2 13

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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