Ta-doped anatase TiO2 epitaxial film as transparent conducting oxide

Taro Hitosugi, Yutaka Furubayashi, Atsuki Ueda, Kinnosuke Itabashi, Kazuhisa Inaba, Yasushi Hirose, Go Kinoda, Yukio Yamamoto, Toshihiro Shimada, Tetsuya Hasegawa

    研究成果: Article査読

    139 被引用数 (Scopus)


    We present electrical transport and optical properties of Ta-doped TiO 2 epitaxial thin films with varying Ta concentration grown by the pulsed laser deposition method. The Ti0.95Ta0.05O 2 film exhibited a resistivity of 2.5 × 10-4 Ωcm at room temperature, and an internal transmittance of 95% in the visible light region. These values are comparable to those of a widely used transparent conducting oxide (TCO), indium tin oxide. Furthermore, this new material falls into a new category of TCOs that utilizes d electrons.

    ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
    出版ステータスPublished - 2005 8 26

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy (miscellaneous)
    • Physics and Astronomy(all)

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