Synthesis of titanium carbonitride films by physical vapour deposition and their structure

Yuji Enomoto, Kazushi Yamanaka

研究成果: Article査読

13 被引用数 (Scopus)
本文言語English
ページ(範囲)L201-L203
ジャーナルThin Solid Films
86
1
DOI
出版ステータスPublished - 1981 11 27

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

引用スタイル