Synthesis of BaxSr1-xTiO3 thin films from complex alkoxide solutions

Tomoaki Satoh, Makoto Ogawa, Mikio Konno

研究成果: Article査読

4 被引用数 (Scopus)

抄録

High dielectric barium-strontium-titanate (Ba0.5Sr0.5)TiO3 (BST) thin films were fabricated by a spincoating technique. The fabrication process consisted of three steps. First, a complex alkoxide was synthesized from barium, strontium and Ti-alkoxide (titanium tetraethoxide) in 2-methoxyethanol at 125°C for 3h. Then, hydrolysis and condensation reactions of the complex alkoxide were carried out at 75°C in 2-methoxyethanol containing nitric acid as a catalysis. Finally, the sols obtained by hydrolysis and condensation of Ba-Sr-Ti complex alkoxide were casted onto glass substrates. The films were subjected to heat treatment at temperatures between 350 and 900°C. The films started to crystallize into a perovskite structure BST at 500°C, and were well-crystallized at 525-550°C. The BST films that were heat-treated at 550°C had dielectric constant exceeding 2000 at 800 Hz.

本文言語English
ページ(範囲)1151-1154
ページ数4
ジャーナルJournal of the Ceramic Society of Japan
106
11
DOI
出版ステータスPublished - 1998 11月
外部発表はい

ASJC Scopus subject areas

  • セラミックおよび複合材料
  • 化学 (全般)
  • 凝縮系物理学
  • 材料化学

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