TY - JOUR
T1 - Surface micro-structuring of titanium oxide crystal and metals using femtosecond laser ablation
AU - Furusawa, K.
AU - Takahashi, K.
AU - Kumagai, H.
AU - Midorikawa, K.
AU - Obara, M.
PY - 1999/12/1
Y1 - 1999/12/1
N2 - The ablation characteristics and the results of microstructuring to titanium oxide rutile crystal ad metal crystals (Au, Ag, Cu) were investigated using an ultrashort pulsed titanium sapphire laser based chirped pulse amplification system with a repetition rate of 1 kHz. Pulse width was continuously varied from 100 fs to 1 ps by adjusting the pulse compressor grating pair of the system. The laser beam was attenuated by optical filters and focused onto the target placed in the vacuum chamber, by taking account of the group delay dispersion of the lens and the filters. The morphology of the ablated surface in terms of depth and beam diameter was observed by FE-SEM.
AB - The ablation characteristics and the results of microstructuring to titanium oxide rutile crystal ad metal crystals (Au, Ag, Cu) were investigated using an ultrashort pulsed titanium sapphire laser based chirped pulse amplification system with a repetition rate of 1 kHz. Pulse width was continuously varied from 100 fs to 1 ps by adjusting the pulse compressor grating pair of the system. The laser beam was attenuated by optical filters and focused onto the target placed in the vacuum chamber, by taking account of the group delay dispersion of the lens and the filters. The morphology of the ablated surface in terms of depth and beam diameter was observed by FE-SEM.
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M3 - Conference article
AN - SCOPUS:0033323656
VL - 2
SP - 635
EP - 636
JO - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
JF - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
SN - 1092-8081
T2 - Proceedings of the 1999 12th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS'99)
Y2 - 8 November 1999 through 11 November 1999
ER -