The ablation characteristics and the results of microstructuring to titanium oxide rutile crystal ad metal crystals (Au, Ag, Cu) were investigated using an ultrashort pulsed titanium sapphire laser based chirped pulse amplification system with a repetition rate of 1 kHz. Pulse width was continuously varied from 100 fs to 1 ps by adjusting the pulse compressor grating pair of the system. The laser beam was attenuated by optical filters and focused onto the target placed in the vacuum chamber, by taking account of the group delay dispersion of the lens and the filters. The morphology of the ablated surface in terms of depth and beam diameter was observed by FE-SEM.
|ジャーナル||Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS|
|出版ステータス||Published - 1999 12月 1|
|イベント||Proceedings of the 1999 12th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS'99) - San Francisco, CA, USA|
継続期間: 1999 11月 8 → 1999 11月 11
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