Surface micro-structuring of titanium oxide crystal and metals using femtosecond laser ablation

K. Furusawa, K. Takahashi, H. Kumagai, K. Midorikawa, M. Obara

研究成果: Conference article査読

抄録

The ablation characteristics and the results of microstructuring to titanium oxide rutile crystal ad metal crystals (Au, Ag, Cu) were investigated using an ultrashort pulsed titanium sapphire laser based chirped pulse amplification system with a repetition rate of 1 kHz. Pulse width was continuously varied from 100 fs to 1 ps by adjusting the pulse compressor grating pair of the system. The laser beam was attenuated by optical filters and focused onto the target placed in the vacuum chamber, by taking account of the group delay dispersion of the lens and the filters. The morphology of the ablated surface in terms of depth and beam diameter was observed by FE-SEM.

本文言語English
ページ(範囲)635-636
ページ数2
ジャーナルConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
2
出版ステータスPublished - 1999 12月 1
イベントProceedings of the 1999 12th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS'99) - San Francisco, CA, USA
継続期間: 1999 11月 81999 11月 11

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

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