Surface form metrology of micro-optics

Bin Xu, Zhigang Jia, Xinghui Li, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao

研究成果: Conference contribution

13 被引用数 (Scopus)

抄録

This keynote starts from an overview of micro-optics from fundamental functions, fabrication methods and applications in precision engineering and nanotechnology. State-of-the-art measuring systems for surface form metrology of microoptics with micro-structured surfaces, including diffractive micro-optics such as diffraction gratings and refractive micro-optics such as micro lenses and micro-lens arrays, are then be presented. The measuring systems introduced in the presentation are classified into scanning probe microscope-based systems, mechanical stylus profiling systems and optical evaluation systems. Related research activities carried out in the authors' group are also highlighted.

本文言語English
ホスト出版物のタイトルInternational Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013
DOI
出版ステータスPublished - 2013 8 15
イベントInternational Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013 - Singapore, Singapore
継続期間: 2013 4 92013 4 11

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
8769
ISSN(印刷版)0277-786X
ISSN(電子版)1996-756X

Other

OtherInternational Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013
CountrySingapore
CitySingapore
Period13/4/913/4/11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

フィンガープリント 「Surface form metrology of micro-optics」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル