Surface acoustic wave characteristics of a ZnO/quartz substrate structure having a large electromechanical coupling factor and a small temperature coefficient

Michio Kadota

研究成果: Article査読

66 被引用数 (Scopus)

抄録

A substrate having a suitable electromechanical coupling factor (ks) value and a good temperature coefficient of frequency (TCF) is required for an applications of resonator surface acoustic wave (SAW) filters and rudder-type SAW filters requiring a specific bandwidth, because their bandwidth largely depends on the coupling factor of the substrate. Although a quartz substrate for SAW devices provides a good TCF, the electromechanical coupling factor obtained is small. The author speculated that an excellent TCF and an appropriate electromechanical coupling factor could be realized by combination of a quartz substrate having a positive TCF and a ZnO film having a negative TCF. As a result of theoretical and experimental investigations performed using a 29°45′ rotated Y and a 42°45′ rotated Y 35°X propagating quartz substrate, an excellent TCF (≈ 0 ppm/°C) and an appropriate coupling factor (ks = 0.1-0.11; ks2 = 0.01-0.0121) were realized with a zero degree power flow angle on the structure of IDT/ZnO/quartz or IDT/ZnO/shorted-plane/quartz for the first time.

本文言語English
ページ(範囲)3076-3080
ページ数5
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
36
5 SUPPL. B
DOI
出版ステータスPublished - 1997 5

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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