Surface acoustic wave based sensors employing ionic liquid for hydrogen sulfide gas detection

Yoshinobu Murakawa, Motoaki Hara, Hiroyuki Oguchi, Yuichiro Hamate, Hiroki Kuwano

研究成果: Article査読

8 被引用数 (Scopus)

抄録

This paper describes a new type hydrogen sulfide (H2S) gas sensor using ionic liquid (IL). In this sensor, a reservoir for the IL was integrated on a surface acoustic wave (SAW) resonator. The IL serves as an absorber for H2S gas. Mass change due to this absorption is detected as shift in the resonant frequency. In this study, we fabricated and demonstrated the sensor using the lithium niobate (LiNbO3) SAW resonator with the resonant frequency of 38 MHz. The integrated reservoir was filled by the IL 1-butyl-3-methylimidazolium hexafluorophosphate ([bmim]-[PF6]). As an experimental result, we observed the linear correlation between the frequency-shift and the exposure time of the sensor to the H2S gas.

本文言語English
ページ(範囲)1255-1259
ページ数5
ジャーナルMicrosystem Technologies
19
8
DOI
出版ステータスPublished - 2013 8

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学

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