Suppression of spurious vibration of cantilever in atomic force microscopy by enhancement of bending rigidity of cantilever chip substrate

Toshihiro Tsuji, Kentaro Kobari, Seishiro Ide, Kazushi Yamanaka

研究成果: Article査読

13 被引用数 (Scopus)

抄録

To improve the precision of dynamic atomic force microscopy (AFM) using cantilever vibration spectra, a simple but effective method for suppressing spurious response (SR) was developed. The dominant origin of SR was identified to be the bending vibration of the cantilever substrate, by the analysis of the frequency of SR. Although a rigid cover pressing the whole surface of the substrate suppressed SR, the utility was insufficient. Then, a method of enhancing the bending rigidity of the substrate by gluing a rigid plate (clamping plate, CP) to the substrate was developed. This chip can be used with an ordinary cantilever holder, so that the reproducibility of SR suppression when attaching and detaching the cantilever chip to the holder was improved. To verify its utility, the evaluation of a microdevice electrode was performed by ultrasonic atomic force microscopy. The delamination at a submicron depth was visualized and the detailed variation of the delamination was evaluated for the first time using clear resonance spectra. The CP method will particularly contribute to improving dynamic-mode AFM, in which resonance spectra with a low quality factor are used, such as noncontact mode AFM in liquid or contact resonance mode AFM. The effect of the CP can be achieved by fabricating a substrate with a thick plate beforehand.

本文言語English
論文番号103703
ジャーナルReview of Scientific Instruments
78
10
DOI
出版ステータスPublished - 2007 11 19

ASJC Scopus subject areas

  • Instrumentation

フィンガープリント 「Suppression of spurious vibration of cantilever in atomic force microscopy by enhancement of bending rigidity of cantilever chip substrate」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル