Superplastic nanoforming of Pd-based amorphous alloy

Yasunori Saotome, Kazuo Itoh, Tao Zhang, Akihisa Inoue

研究成果: Article査読

185 被引用数 (Scopus)

抄録

A precision forming process of microelectromechanical systems (MEMS) parts was described. The forming process was via superplastic microforming of metallic glasses. The Pd-based amorphous alloys were used and were found to be useful for high-performance micro-actuators and microstructures. The macroscopic and microscopic deformation behavior was investigated in the supercooled liquid temperature range.

本文言語English
ページ(範囲)1541-1545
ページ数5
ジャーナルScripta Materialia
44
8-9
DOI
出版ステータスPublished - 2001 5 18

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys

フィンガープリント 「Superplastic nanoforming of Pd-based amorphous alloy」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル