Superplastic nanoforging of Pt-based metallic glass with dies of Zr-BMG and glassy carbon fabricated by focused ion beam

Yasunori Saotome, Suguru Okaniwa, Hisamichi Kimura, Akihisa Inoue

研究成果: Conference contribution

12 被引用数 (Scopus)

抄録

This paper introduces a technique for fabricating nano-structures through super plastic nano-forging of metallic glass using nano-scale dies that are fabricated by a focused-ion beam (FIB). FIB-machining characteristics of glassy carbon and Zr-based metallic glass have been studied and are useful for fabricating nano-scale dies because of the isotropic homogeneity of their amorphous structures, We used the dies to nano-forge Pt48.75Pd 9.75Cu19.5P22 metallic glass. The thin foil specimens were heated in a small furnace and compressively loaded in a small vacuum chamber. Dies, a die-forged 1μ-diameter micro-gear, and both 800 and 400nm periodic nano-structures for optical applications were demonstrated. We observed the effects of thermal expansion and contact angle between the working material and the die materials on nano-formability. Metallic glasses are highly useful as materials for nano-imprinting and as die materials for FIB nano-machining.

本文言語English
ホスト出版物のタイトルSupplement to THERMEC 2006, 5th International Conference on PROCESSING and MANUFACTURING OF ADVANCED MATERIALS, THERMEC 2006
出版社Trans Tech Publications Ltd
ページ2088-2093
ページ数6
PART 2
ISBN(印刷版)0878494286, 9780878494286
DOI
出版ステータスPublished - 2007 1月 1
イベント5th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2006 - Vancouver, Canada
継続期間: 2006 7月 42006 7月 8

出版物シリーズ

名前Materials Science Forum
番号PART 2
539-543
ISSN(印刷版)0255-5476
ISSN(電子版)1662-9752

Other

Other5th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2006
国/地域Canada
CityVancouver
Period06/7/406/7/8

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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