Sub-nanowatt thermal detection device based on a Si double-supported resonator for single cells

研究成果: Conference contribution

抄録

We have developed a highly sensitive thermal detection device based on a Si double-supported resonator to measure a heat from single cells. The double-supported resonators are expected to have a large temperature coefficient of the resonant frequency (TCF). The sensor is vacuum-enclosed in a microfluidic chip, which make it possible to measure the heat from cells captured in liquid with negligible heat loss to the surrounding and damping. The TCF of the fabricated sensor is -590 ppm/K, and 0.16 nW/√Hz of the thermal resolution is achieved. Then, the thermal measurement of a single brown fat cell is succeeded by using the fabricated device.

本文言語English
ホスト出版物のタイトルMicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences
出版社Chemical and Biological Microsystems Society
ページ69-71
ページ数3
ISBN(電子版)9780979806483
出版ステータスPublished - 2015 1 1
イベント19th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2015 - Gyeongju, Korea, Republic of
継続期間: 2015 10 252015 10 29

出版物シリーズ

名前MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Other

Other19th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2015
CountryKorea, Republic of
CityGyeongju
Period15/10/2515/10/29

ASJC Scopus subject areas

  • Control and Systems Engineering

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