Study on the measurement of microscopic RF field distribution with a MFM tip exploiting a beat signal between a CPW and an exciting coil

Y. Endo, M. Onishi, M. Fukushima, K. Arai, K. Yanagi, Y. Shimada, M. Yamaguchi

研究成果: Conference contribution

抄録

This paper describes a measurement of microscopic radio frequency (RF) field distribution with a magnetic force microscope (MFM) tip exploring a beat signal from a coplanar waveguide (CPW). This CPW has a 5 μm wide signal line and a 50 μm wide ground line assuming a basic model of power/ground lines in radio frequency integrated circuit (RFIC) chips. To produce a beating field near the CPW, a signal current with a fixed frequency in the GHz range is supplied to the CPW and a reference current with a slightly different frequency from a signal frequency is supplied to a semicircular exciting coil. The reference is adjusted to produce the beat with frequency in the vicinity of the cantilever resonance frequency. The mechanical resonance of the cantilever responding to the beat field above the CPW surface was successfully detected with signal frequency in the GHz range. This result provides a basic principle that, by exploring a reference RF field, RF magnetic fields radiated from signal lines, ground lines and power sources in RFIC chips are detectable with very high spatial resolution.

本文言語English
ホスト出版物のタイトルEMC 2014/Tokyo - 2014 International Symposium on Electromagnetic CompatibiIity, Proceedings
出版社Institute of Electrical and Electronics Engineers Inc.
ページ517-520
ページ数4
ISBN(電子版)9784885522871
出版ステータスPublished - 2014 12月 23
イベント2014 International Symposium on Electromagnetic CompatibiIity, EMC 2014 - Tokyo, Japan
継続期間: 2014 5月 122014 5月 16

出版物シリーズ

名前IEEE International Symposium on Electromagnetic Compatibility
2014-December
ISSN(印刷版)1077-4076
ISSN(電子版)2158-1118

Other

Other2014 International Symposium on Electromagnetic CompatibiIity, EMC 2014
国/地域Japan
CityTokyo
Period14/5/1214/5/16

ASJC Scopus subject areas

  • 凝縮系物理学
  • 電子工学および電気工学

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