Structures and optical properties of indium doped SrTiO3 thin films by oxygen plasma-assisted pulsed laser deposition

Yiwen Zhang, Xiaomin Li, Weidong Yu, Xiangdong Gao, Feng Wu, Jinfang Kong, Wenzhong Shen

研究成果: Conference contribution

抄録

Undoped and In-doped SrInxTi1-xO3(x=0, 0.1, 0.2) films have been deposited on Si(100) and quartz substrates by oxygen plasma-assisted pulsed laser deposition (PLD). Effects of indium doping on the crystallinity and the optical energy band gap of SrTiO3 (STO) films were investigated. Results indicate that undoped STO film is of rather good crystallinity and low defects concentration. However indium doping deteriorates the crystallinity of the STO film, and results in the roughening of the film surface. Moreover the a-axis length monotonically increases when increasing In content. For all the films, the average transmission in the visible wavelength region (λ=400-800nm) is over 75%. The optical energy band gap of STO thin films, measured from transmittance spectra, changes from 3.67eV to 3.93eV by indium doping.

本文言語English
ホスト出版物のタイトルSixth International Conference on Thin Film Physics and Applications
DOI
出版ステータスPublished - 2008
外部発表はい
イベント6th International Conference on Thin Film Physics and Applications, TFPA 2007 - Shanghai, China
継続期間: 2007 9月 252007 9月 28

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
6984
ISSN(印刷版)0277-786X

Other

Other6th International Conference on Thin Film Physics and Applications, TFPA 2007
国/地域China
CityShanghai
Period07/9/2507/9/28

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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