Structure, mechanical properties and imprint-ability of Pd-Cu-Ni-P glassy alloy thin film prepared by a pulsed-laser deposition method

Kana Takenaka, Nozomu Togashi, Nobuyuki Nishiyama, Akihisa Inoue

研究成果: Article査読

7 被引用数 (Scopus)

抄録

With the aim of preparing nano-hole array for bit patterned media of ultra high density data storage, fabrication and imprint-ability of Pd-Cu-Ni-P glassy alloy thin film was investigated. By using a pulsed-laser deposition method, the Pd-based glassy alloy thin film was successfully fabricated. The thermal characteristics of the obtained film were very close to those of the melt-spun glassy alloy ribbon. The obtained film has very smooth surface and high hardness, which are suitable for nano-imprint processing. Nano-imprint-ability of the obtained film is demonstrated by using dot array mold with a dot diameter of 30 nm. The periodic dot pattern of the mold was precisely transcribed. These results suggest that the Pd-Cu-Ni-P glassy alloy thin films are potential nano-imprinting materials for fabricating bit patterned media.

本文言語English
ページ(範囲)1542-1545
ページ数4
ジャーナルJournal of Non-Crystalline Solids
356
31-32
DOI
出版ステータスPublished - 2010 7 8

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • セラミックおよび複合材料
  • 凝縮系物理学
  • 材料化学

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