Structure control of carbon nanotubes using radio-frequency plasma enhanced chemical vapor deposition

T. Kato, G. H. Jeong, T. Hirata, R. Hatakeyama

研究成果: Conference article

31 引用 (Scopus)

抜粋

Carbon nanotube structures such as tube diameter, growth site, and formation density are controlled using radio-frequency (RF, 13.56 MHz) plasma enhanced chemical vapor deposition (RF-PECVD) method. We have produced uniformly well-aligned multi-walled carbon nanotubes (MWNTs) grown over the large scale area and linearly arrayed MWNTs grown in a selected area without any highly-sophisticated patterning process. In our RF-PECVD experiment, furthermore, individually grown single-walled carbon nanotubes (SWNTs) or their thin bundles are synthesized for the first time within the scope of the PECVD methods. These results indicate that PECVD method provides the high potential for the further development of nano-technology.

元の言語English
ページ(範囲)2-6
ページ数5
ジャーナルThin Solid Films
457
発行部数1
DOI
出版物ステータスPublished - 2004 6 1
イベント16th Symposium on Plasma Science for Materials (SPSM-16) - Tokyo, Japan
継続期間: 2003 6 42003 6 5

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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