We have investigated the structure and magnetic properties of iron nitride films prepared by reactive dc magnetron sputtering with an argon gas flow rate of 12 sccm and a nitrogen gas flow rate varied between 0-10 sccm. Under the above conditions, the nitrogen concentrations in the iron nitride films were changed from 0 to 33 at.%. The phase and structure of the films changed from α-Fe, amorphous matrix with nanocrystallites of ε-Fe3N, ε-FexN (2 < x ≤ 3) to ζ-Fe2N phase as the nitrogen concentration of the iron nitride films increases, and these changes in the phase almost correspond to the Fe-N phase diagram. The saturation magnetization of the iron nitride films decreases as the nitrogen concentration increases up to 31 at.%, and disappears at 33 at.%. A relatively low coercivity of 9 Oe is observed at the nitrogen concentrations from 11 to 18 at.%. From the results of structural analysis and magnetic measurements, it is confirmed that the coercivity of the iron nitride films mostly correlates with the changes in grain size.
|ジャーナル||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|出版ステータス||Published - 2004 7 1|
ASJC Scopus subject areas
- Physics and Astronomy(all)