Structural properties of amorphous carbon nitride films prepared by reactive rf-magnetron sputtering
Noriaki Nakayama, Yasuaki Tsuchiya, Satoru Tamada, Kouji Kosuge, Shinji Nagata, Katsumi Takahiro, Sadae Yamaguchi
研究成果: Article › 査読
136
被引用数
(Scopus)