抄録
Highly nitrogenated amorphous carbon films have been prepared by reactive rf-magnetron sputtering using pure N2 or Ar/N2 mixed gases. The nitrogen content measured by Rutherford backscattering spectrometry was 40 at% for pure N2 gas and 35 at% for Ar75%-N225% mixed gas. Oxygen atoms of about 7 at% were also detected. Infrared spectra showed a broad absorption band in the range from 1200 to 1600 cm-1 assigned to the N atoms incorporated in the bonding network of amorphous carbon. They showed an absorption band near 2200 cm-1 assigned to the C=N or N = C = 0 bond, but no trace of the N-H or C-H bond was seen.
本文言語 | English |
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ページ(範囲) | 1465-1468 |
ページ数 | 4 |
ジャーナル | Japanese journal of applied physics |
巻 | 32 |
号 | 10 A |
DOI | |
出版ステータス | Published - 1993 10月 |
外部発表 | はい |
ASJC Scopus subject areas
- 工学(全般)
- 物理学および天文学(全般)