TY - JOUR
T1 - Structural characterization of iron silicides nanoparticles grown on Si substrate
T2 - Annealing rate dependence
AU - Won, J. H.
AU - Sato, Kazuhisa
AU - Ishimaru, M.
AU - Hirotsu, Y.
PY - 2006/5/1
Y1 - 2006/5/1
N2 - We have synthesized iron silicides on a Si(111) substrate using an electron-beam evaporation technique in combination with thermal annealing. The microstructures, as a function of heating rate on annealing, were characterized by transmission electron microscopy (TEM). Bright-field plan-view TEM observations revealed that a discontinuous thin film is formed in the sample annealed rapidly, while complete separated nanoparticles were obtained in the specimen annealed slowly. Selected-area and nano-beam electron diffraction patterns indicated that the former and latter specimens mainly consist of iron monosilicide (ε-FeSi) and iron disilicide (β-FeSi2) phases, respectively.
AB - We have synthesized iron silicides on a Si(111) substrate using an electron-beam evaporation technique in combination with thermal annealing. The microstructures, as a function of heating rate on annealing, were characterized by transmission electron microscopy (TEM). Bright-field plan-view TEM observations revealed that a discontinuous thin film is formed in the sample annealed rapidly, while complete separated nanoparticles were obtained in the specimen annealed slowly. Selected-area and nano-beam electron diffraction patterns indicated that the former and latter specimens mainly consist of iron monosilicide (ε-FeSi) and iron disilicide (β-FeSi2) phases, respectively.
UR - http://www.scopus.com/inward/record.url?scp=33744534678&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33744534678&partnerID=8YFLogxK
U2 - 10.1007/s10853-006-7820-0
DO - 10.1007/s10853-006-7820-0
M3 - Article
AN - SCOPUS:33744534678
VL - 41
SP - 2611
EP - 2614
JO - Journal of Materials Science
JF - Journal of Materials Science
SN - 0022-2461
IS - 9
ER -