Structural characterization of iron silicides nanoparticles grown on Si substrate: Annealing rate dependence

J. H. Won, Kazuhisa Sato, M. Ishimaru, Y. Hirotsu

    研究成果: Article査読

    抄録

    We have synthesized iron silicides on a Si(111) substrate using an electron-beam evaporation technique in combination with thermal annealing. The microstructures, as a function of heating rate on annealing, were characterized by transmission electron microscopy (TEM). Bright-field plan-view TEM observations revealed that a discontinuous thin film is formed in the sample annealed rapidly, while complete separated nanoparticles were obtained in the specimen annealed slowly. Selected-area and nano-beam electron diffraction patterns indicated that the former and latter specimens mainly consist of iron monosilicide (ε-FeSi) and iron disilicide (β-FeSi2) phases, respectively.

    本文言語English
    ページ(範囲)2611-2614
    ページ数4
    ジャーナルJournal of Materials Science
    41
    9
    DOI
    出版ステータスPublished - 2006 5月 1

    ASJC Scopus subject areas

    • 材料科学(全般)
    • 材料力学
    • 機械工学

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