Structural and optical properties of AlN grown by solid source solution growth method

Yoshihiro Kangawa, Hiroshige Suetsugu, Michael Knetzger, Elke Meissner, Kouji Hazu, Shigefusa F. Chichibu, Takashi Kajiwara, Satoru Tanaka, Yosuke Iwasaki, Koichi Kakimoto

研究成果: Article査読

抄録

Structural and optical properties of AlN grown on AlN(0001) by the solid source solution growth (3SG) method were investigated. Transmission electron microscopy (TEM) analysis revealed that the geometrical relationship between the growth directions and slip planes influenced the dislocation propagation behaviors and annihilation mechanisms. Panchromatic and monochromatic images in the cathodoluminescence (CL) spectrum further revealed that C impurities were segregated near the surface, while Al vacancies were widely distributed in the AlN/AlN(0001) grown using the 3SG method.

本文言語English
論文番号085501
ジャーナルJapanese journal of applied physics
54
8
DOI
出版ステータスPublished - 2015 8月 1

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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