We investigated the structural and magnetic properties of Co 2FeAl05Si05 (CFAS) thin films on GaAs substrates. The CFAS thin films grew epitaxially on GaAs with CFAS (100) || GaAs (100) relation and formed an ordered L21structure with substrate heating deposition at TSUB = 300°C, 400 °C and post annealed at TPA = 400°C Moreover, we confirmed the no reaction between CFAS and GaAs. The CFAS thin films on GaAs showed strong uniaxial magnetic anisotropy with an easy axis of [1 10]CFAS (GaAs) direction and the magnetic anisotropy generally increased by decreasing the thickness of CFAS. The magnetic moment of the CFAS film deposited with substrate heating at 300 °C was approximately 4.8μB/f.u. at room temperature.
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