Stochastic strain sensor using pull-in probability under white-noise-applied bistable state with reliable pull-in release mechanism

Y. Hatakeyama, Masayoshi Esashi, S. Tanaka

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

This paper describes a MEMS based stochastic sensor, which will be used in low S/N environments like high temperature plants. The mass which vibrates between two counter electrodes by white noise voltage is "pulled-in" to either of the counter electrodes by applying pulse voltage to the mass. The direction of the pull-in is determined stochastically, and the probability that the mass is pulled in to a particular side depends on mechanical strain applied to the sensor. Therefore, strain can be measured just by counting the number of pull-in to a particular side, which is easy even in low S/N environments. We demonstrated this sensing principle using an SOI-based sensor, which had a reliable pull-in release mechanism using a non-linear spring structure. We also demonstrated that the pull-in probability could be tuned by bias voltage applied to the counter electrodes, as predicted by simulation.

本文言語English
ホスト出版物のタイトル2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
ページ640-643
ページ数4
DOI
出版ステータスPublished - 2011 4月 13
イベント24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
継続期間: 2011 1月 232011 1月 27

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
国/地域Mexico
CityCancun
Period11/1/2311/1/27

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 機械工学
  • 凝縮系物理学
  • 電子材料、光学材料、および磁性材料

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