STEM observation of nano-interface between substrate and DLC film prepared by plasma-based ion implantation and deposition

Y. Oka, M. Nishijima, K. Hiraga, M. Yatsuzuka

研究成果: Article査読

7 被引用数 (Scopus)

抄録

This paper discusses the nano-interface between an aluminum alloy (A5052) substrate and diamond-like carbon (DLC) film prepared by a hybrid process of plasma-based ion implantation and deposition (PBIID) using superimposed RF and negative high-voltage pulses. Adhesion strength of DLC films were enhanced by carbon ion implantation to the substrate. The nano-interface between DLC film and substrate was observed by high resolution transmission electron microscopy (HRTEM) and scanning transmission electron microscopy (STEM) and analyzed by energy dispersive X-ray spectroscopy (EDS). It was found that an unclear crystal structure damaged by ion implantation was formed in the carbon ion-implanted layer. Besides, the amorphous mixing layer of oxide and DLC was produced on the substrate surface. The formation of the mixing layer, the layer of unclear crystal structure and the destruction of oxide led to the enhancement in adhesion strength of DLC film.

本文言語English
ページ(範囲)702-705
ページ数4
ジャーナルNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
257
1-2 SPEC. ISS.
DOI
出版ステータスPublished - 2007 4

ASJC Scopus subject areas

  • 核物理学および高エネルギー物理学
  • 器械工学

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