TY - JOUR
T1 - Statistical optimization of a DC-RF hybrid plasma flow system for in-flight particle treatment
AU - Kawajiri, K.
AU - Ramachandran, K.
AU - Nishiyama, H.
N1 - Funding Information:
We would like to give our sincere thanks to senior technician Mr. K. Katagiri in our laboratory, and also to Mr. T. Watanabe and Mr. N. Ito in the institute workshop. This research was partially supported by a grant-in-aid for Scientific Research (B) from the Japan Society for Promotion of Science (2001–2003) and a 21st Century COE Program Grant of the International COE of Flow Dynamics from the Ministry of Education, Culture, Sports, Science and Technology.
PY - 2005/1
Y1 - 2005/1
N2 - There are many input parameters to control a DC-RF hybrid plasma flow system, such as total gas flow rate, central gas flow rate, swirl gas ratio, RF power and DC power. Furthermore, the interactive effects among these parameters should be considered. In the present study, statistical analysis using simple linear model is conducted to clarify the effects of the input parameters and their interactions on the outputs such as particle residence time and average temperature in a DC-RF hybrid plasma flow system. The thermofluid characteristics of a DC-RF hybrid plasma flow are compared with those of an RF plasma flow. It is shown that the plasma characteristics are changed drastically by adding even small DC power. Furthermore, controllability is also improved by optimizing the operating conditions of a DC-RF hybrid plasma flow system.
AB - There are many input parameters to control a DC-RF hybrid plasma flow system, such as total gas flow rate, central gas flow rate, swirl gas ratio, RF power and DC power. Furthermore, the interactive effects among these parameters should be considered. In the present study, statistical analysis using simple linear model is conducted to clarify the effects of the input parameters and their interactions on the outputs such as particle residence time and average temperature in a DC-RF hybrid plasma flow system. The thermofluid characteristics of a DC-RF hybrid plasma flow are compared with those of an RF plasma flow. It is shown that the plasma characteristics are changed drastically by adding even small DC power. Furthermore, controllability is also improved by optimizing the operating conditions of a DC-RF hybrid plasma flow system.
KW - DC-RF hybrid plasma flow
KW - Interaction
KW - Optimization
KW - Particle
KW - Statistical analysis
KW - Thermofluid field
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U2 - 10.1016/S0017-9310(04)00359-X
DO - 10.1016/S0017-9310(04)00359-X
M3 - Article
AN - SCOPUS:9244223538
VL - 48
SP - 183
EP - 190
JO - International Journal of Heat and Mass Transfer
JF - International Journal of Heat and Mass Transfer
SN - 0017-9310
IS - 1
ER -