TY - JOUR
T1 - Specified Position Sensing Technique by using the Light Diffracted from a Circular Grating
AU - Ito, Masafumi
AU - Kawaguchi, Hisao
AU - Hane, Kazuhiro
AU - Matsuda, Fumio
AU - Goto, Toshio
PY - 1991
Y1 - 1991
N2 - A position sensing technique by using the light diffracted from a small circular grating is proposed. The circular grating is attached to the surface of the object as a reference for the measurement (reference point). The grating is irradiated by laser light and the elliptical pattern generated by diffraction is measured by a CCD image sensor. By processing the diffraction pattern, the distance from the detector to the reference point is obtained. In addition, it is possible to derive the three dimensional position of the reference point and the inclination of the work surface. The experiments were carried out by using a circular grating of 20 µm pitch and 0.6 mm diameter. The accuracies of the measurements are also discussed.
AB - A position sensing technique by using the light diffracted from a small circular grating is proposed. The circular grating is attached to the surface of the object as a reference for the measurement (reference point). The grating is irradiated by laser light and the elliptical pattern generated by diffraction is measured by a CCD image sensor. By processing the diffraction pattern, the distance from the detector to the reference point is obtained. In addition, it is possible to derive the three dimensional position of the reference point and the inclination of the work surface. The experiments were carried out by using a circular grating of 20 µm pitch and 0.6 mm diameter. The accuracies of the measurements are also discussed.
KW - circular grating
KW - distance measurement
KW - three dimensional position measurement
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U2 - 10.2493/jjspe.57.280
DO - 10.2493/jjspe.57.280
M3 - Article
AN - SCOPUS:0026106317
SN - 0912-0289
VL - 57
SP - 280
EP - 285
JO - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
JF - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
IS - 2
ER -