Solidly mounted resonator using shear horizontal mode plate wave in LiNbO3 plate

Michio Kadota, Shuji Tanaka

研究成果: Conference contribution

10 被引用数 (Scopus)

抄録

A 0-th shear horizontal (SHo) mode plate wave has an electromechanical coupling factor k2 larger than 50% in a (0°, 120°, 0°) LiNbOs (LN) plate thinner than 0.1λ (λ is a pitch of interdigital transducer). However, the structure is fragile, because the plate thickness is as thin as 0.5∼0.6 μm for devices working in several hundred MHz range. To address this issue, a solidly mounted resonator (SMR) structure was applied to SH mode plate resonators. The materials and layer thicknesses of a Bragg reflector, the Euler angle and thickness of a LN plate, and the thickness and material of electrodes were investigated to obtain large k2 and spurious-free response by finite element method (FEM) simulation. The designed Bragg reflector is composed of 6 layers of SiO2 and AlN. The best Euler angle is (0°, 90°, 0°) and the suitable thickness of a LN plate is 0.3 to 1 λ. Also, heavy and thick electrodes are better for interdigital transducers (IDT). This design is significantly different from that of the cavity type. A SMR type plate wave resonator of several hundred MHz was fabricated using 2 μm thick LN, and a wide bandwidth of 20% was measured.

本文言語English
ホスト出版物のタイトル2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings
出版社Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9781509020911
DOI
出版ステータスPublished - 2016 8月 16
イベント70th IEEE International Frequency Control Symposium, IFCS 2016 - New Orleans, United States
継続期間: 2016 5月 92016 5月 12

出版物シリーズ

名前2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings

Other

Other70th IEEE International Frequency Control Symposium, IFCS 2016
国/地域United States
CityNew Orleans
Period16/5/916/5/12

ASJC Scopus subject areas

  • コンピュータ ネットワークおよび通信
  • 器械工学

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