Soft-switching control circuit based on traveling and reflected waves for high-frequency resonant inverter applicable to capacitive load impedance

Aoi Oyane, Koji Itakura, Kazuhiro Umetani, Eiji Hiraki, Tatsuya Ikenari, Shingo Kawano

研究成果: Conference contribution

抄録

esonant inverters are widely utilized to generate high-frequency high voltage A C power for the power supply to the plasma generator. These inverters commonly require the load impedance to be inductive for achieving soft-switching operation. However, the impedance often fluctuates to be momentarily capacitive due to the unstable state of the plasma, thus causing enormous switching loss and possibly destroying the inverters. This paper addresses this difficulty by using a recently-proposed resonant inverter that can achieve soft-switching operation under the capacitive load impedance. For this purpose, this paper proposes a novel soft-switching controller for applying this inverter for plasma generator application. The proposed controller observes the load impedance and controls the resonant inverter according to the impedance value. Because of the high-frequency A C power supply to the plasma generator, the voltage and current measurement are difficult for estimation of the load impedance. Therefore, the proposed controller estimates the load impedance based on traveling and reflected wave measurement. The experiment revealed successful control of the inverter according to the load impedance, suggesting high feasibility for applying the inverter to the plasma generator.

本文言語English
ホスト出版物のタイトルProceedings
ホスト出版物のサブタイトルIECON 2018 - 44th Annual Conference of the IEEE Industrial Electronics Society
出版社Institute of Electrical and Electronics Engineers Inc.
ページ3051-3056
ページ数6
ISBN(電子版)9781509066841
DOI
出版ステータスPublished - 2018 12 26
外部発表はい
イベント44th Annual Conference of the IEEE Industrial Electronics Society, IECON 2018 - Washington, United States
継続期間: 2018 10 202018 10 23

出版物シリーズ

名前Proceedings: IECON 2018 - 44th Annual Conference of the IEEE Industrial Electronics Society

Conference

Conference44th Annual Conference of the IEEE Industrial Electronics Society, IECON 2018
CountryUnited States
CityWashington
Period18/10/2018/10/23

ASJC Scopus subject areas

  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering
  • Control and Optimization

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