Multilayered thin films from various soft magnetic materials were successfully prepared by magnetron sputtering in Ar atmosphere. The magnetic properties and microstructure were investigated. It is found that the films show good soft magnetic properties: magnetic coercivity of 1-10 Oe and saturation magnetization higher than 1T. The initial permeability of the films is greater than 300 and flattens up to 600 MHz. The multilayer thin film properties in combination with their easy, fast and reproducible fabrication indicate that they are potential candidates for high frequency applications.
|出版ステータス||Published - 2015|
|イベント||20th International Conference on Magnetism, ICM 2015 - Barcelona, Spain|
継続期間: 2015 7 5 → 2015 7 10
ASJC Scopus subject areas