The effect of Co content on the magnetic properties has been systematically investigated, to obtain high frequency soft magnetic Cox-(TiN) 1-x films. The films with Co content more than 73 at.% are perpendicular magnetic, and the films with Co content less than 45 at.% are both soft and super-para magnetic. In a wide-range of Co content (x=45-73 at.%), the Cox-(TiN)1-x nanogranular films show good soft magnetic properties, with coercivity as low as 4 Oe and magnetization around 6-12 kG. The permeability of the films is as high as about 400 and the resonance frequency is around 1 GHz. The films exhibit good thermal stability with the low coercivity of about 5 Oe even after the annealing at 500 ° C, which is very important in viewpoint of application like a CMOS-compatible fabrication technology.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering