Skin effect suppression in multilayer thin-film spiral inductor taking advantage of negative permeability of magnetic film beyond FMR frequency

研究成果: Conference contribution

10 被引用数 (Scopus)

抄録

This paper describes the study on skin effect suppression in multilayer thin film coplanar transmission lines and spiral inductors taking advantage of negative permeability of ferromagnetic film beyond the ferromagnetic resonance (FMR) frequency. The Al/NiFe and Cu/CoZrNb multilayered thin film coplanar transmission lines are studied. The measured resistance of both coplanar transmission lines becomes small when the real part permeability is negative, as the number of layers is more than 15, suggesting that each metal layer should be thinner than the skin depth of original metal layer. As for the spiral inductor consisting of Cu/CoZrNb multilayered thin film, the quality factor exhibited 14.6 at 5.2 GHz at largest.

本文言語English
ホスト出版物のタイトルEuropean Microwave Week 2010, EuMW2010
ホスト出版物のサブタイトルConnecting the World, Conference Proceedings - European Microwave Conference, EuMC 2010
ページ1182-1185
ページ数4
出版ステータスPublished - 2010
イベント13th European Microwave Week 2010, EuMW2010: Connecting the World - 40th European Microwave Conference, EuMC 2010 - Paris, France
継続期間: 2010 9 282010 9 30

出版物シリーズ

名前European Microwave Week 2010, EuMW2010: Connecting the World, Conference Proceedings - European Microwave Conference, EuMC 2010

Other

Other13th European Microwave Week 2010, EuMW2010: Connecting the World - 40th European Microwave Conference, EuMC 2010
国/地域France
CityParis
Period10/9/2810/9/30

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 放射線

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