We fabricated nanosized KMgF3 single crystals via a dry pulsed laser ablation process using femtosecond laser pulses. The sizes, shapes, and crystallographic properties of the crystals were evaluated by transmission electron microscopy (TEM). Almost all of the particles were spherical with diameters of less than 100 nm, and they were not highly agglomerated. Selected-area electron diffraction and high-resolution TEM analyses showed that the particles were single crystals. Particle diameter was controlled within a wide range by adjusting the Ar ambient gas pressure. Under low gas pressures (1 and 10 Pa), relatively small particles (primarily 10 nm or less) were observed with a high number density. With increasing pressure, the mean diameter increased and the number density drastically decreased. Vacuum-ultraviolet cathodoluminescence was observed at 140–230 nm with blue shift and broadening of spectrum.
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