Simulation Study of Total-Electron-Yield X-ray Standing-Wave Spectra of Mo/SiC/Si/SiC and Mo/Si Multilayers

Takeo Ejima, Yasuji Muramatsu, Hisataka Takenaka, Makoto Watanabe

    研究成果: Conference contribution

    5 被引用数 (Scopus)

    抄録

    Total-electron-yield X-ray standing-wave (TEY-XSW) spectra of Mo/SiC/Si/SiC multilayers (Muramatsu et al., Jpn. J. Appl. Phys., 41 (2002) 4250.) were simulated by the use of the calculation method for TEY spectra of multilayers. The existence of a 2Å thick SiO2 and a 18Å thick Mo layers on the periodic Mo/SiC/Si/SiC multilayer was confirmed. In addition, the simulation study on Mo/Si multilayers covered with top Mo layers was performed. The TEY-XSW spectra were sensitive to the thickness of the top Mo layer as for the spectral shapes and peak positions. It was made clear that the TEY-XSW method is useful to elucidate the multilayer structure near the top layer.

    本文言語English
    ホスト出版物のタイトルSynchrotron Radiation Instrumentation
    ホスト出版物のサブタイトル8th International Conference on Synchrotron Radiation Instrumentation
    出版社American Institute of Physics Inc.
    ページ1126-1129
    ページ数4
    ISBN(電子版)0735401799
    DOI
    出版ステータスPublished - 2004 5 12
    イベント8th International Conference on Synchrotron Radiation Instrumentation - San Francisco, United States
    継続期間: 2003 8 252003 8 29

    出版物シリーズ

    名前AIP Conference Proceedings
    705
    ISSN(印刷版)0094-243X
    ISSN(電子版)1551-7616

    Other

    Other8th International Conference on Synchrotron Radiation Instrumentation
    国/地域United States
    CitySan Francisco
    Period03/8/2503/8/29

    ASJC Scopus subject areas

    • 物理学および天文学(全般)

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