Silicon-germanium alloy prepared by laser-induced pyrolysis of organogermanium nanocluster spin-coated on Si substrate

Akira Watanabe, Masashi Unno, Fusao Hojo, Takao Miwa

研究成果: Article査読

6 被引用数 (Scopus)

抄録

The silicon-germanium alloys prepared by laser-induced pyrolysis of organogermanium nanocluster (OGE) spin-coated on Si substrate were discussed. An inorganic film was found to be prepared by heat treatment of the OGE film accompanying the elimination of organic substituents. The structural and morphological changes using increasing the number of laser shots were also studied using micro-Raman spectroscopy and scanning electron microscopy (SEM).

本文言語English
ページ(範囲)3043-3047
ページ数5
ジャーナルMaterials Letters
57
20
DOI
出版ステータスPublished - 2003 6 1

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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