Silicon-germanium alloy prepared by laser-induced pyrolysis of organogermanium nanocluster spin-coated on Si substrate

Akira Watanabe; Masashi Unno; Fusao Hojo; Takao Miwa

doi:10.1016/S0167-577X(02)01428-3

Silicon-germanium alloy prepared by laser-induced pyrolysis of organogermanium nanocluster spin-coated on Si substrate

Akira Watanabe, Masashi Unno, Fusao Hojo, Takao Miwa

多元物質科学研究所・金属資源プロセス研究センター

研究成果: Article › 査読

6 被引用数 (Scopus)

抄録

The silicon-germanium alloys prepared by laser-induced pyrolysis of organogermanium nanocluster (OGE) spin-coated on Si substrate were discussed. An inorganic film was found to be prepared by heat treatment of the OGE film accompanying the elimination of organic substituents. The structural and morphological changes using increasing the number of laser shots were also studied using micro-Raman spectroscopy and scanning electron microscopy (SEM).

本文言語	English
ページ（範囲）	3043-3047
ページ数	5
ジャーナル	Materials Letters
巻	57
号	20
DOI	https://doi.org/10.1016/S0167-577X(02)01428-3
出版ステータス	Published - 2003 6 1

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

文献へのアクセス

10.1016/S0167-577X(02)01428-3

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引用スタイル

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keywords = "Laser-induced pyrolysis, Micro-Raman spectroscopy, Organogermanium nanocluster, Silicon-germanium alloys",

author = "Akira Watanabe and Masashi Unno and Fusao Hojo and Takao Miwa",

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AU - Unno, Masashi

AU - Hojo, Fusao

AU - Miwa, Takao

PY - 2003/6/1

Y1 - 2003/6/1

N2 - The silicon-germanium alloys prepared by laser-induced pyrolysis of organogermanium nanocluster (OGE) spin-coated on Si substrate were discussed. An inorganic film was found to be prepared by heat treatment of the OGE film accompanying the elimination of organic substituents. The structural and morphological changes using increasing the number of laser shots were also studied using micro-Raman spectroscopy and scanning electron microscopy (SEM).

AB - The silicon-germanium alloys prepared by laser-induced pyrolysis of organogermanium nanocluster (OGE) spin-coated on Si substrate were discussed. An inorganic film was found to be prepared by heat treatment of the OGE film accompanying the elimination of organic substituents. The structural and morphological changes using increasing the number of laser shots were also studied using micro-Raman spectroscopy and scanning electron microscopy (SEM).

KW - Laser-induced pyrolysis

KW - Micro-Raman spectroscopy

KW - Organogermanium nanocluster

KW - Silicon-germanium alloys

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