Silicon-based micro/nanomechanics for nanoengineering

研究成果: Paper査読

抄録

This paper reports on recent development of micro instrumentations based on advanced silicon technologies for nanoengineering and nanoscience. Demonstration of some miniaturized and integrated micro/nanomechanics, including four-terminal microprobes, optical bow-tie probes, nanomechanical sensors, multiprobe for future high-density data storage, and carbon nanotube mechanics and carbon nanotube electron sources for electron emission devices, are presented. .

本文言語English
ページ1969-1972
ページ数4
出版ステータスPublished - 2005 12月 1
イベントIDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005 - Takamatsu, Japan
継続期間: 2005 12月 62005 12月 9

Other

OtherIDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005
国/地域Japan
CityTakamatsu
Period05/12/605/12/9

ASJC Scopus subject areas

  • 工学(全般)

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