Silicon Adiabatic Waveguide Coupler Switch Using Lateral Comb Actuators

T. Nagai, K. Hane

研究成果: Conference contribution

1 引用 (Scopus)

抜粋

A matrix-Type silicon photonic waveguide switch using adiabatic couplers with lateral comb-drive actuators is studied. One of the waveguides of the coupler is moved laterally by three actuators for switching. The movable waveguide is the tapered waveguide of the adiabatic coupler. The three actuators are ultra-small electrostatic comb-driven and move the connected tapered waveguides. The transmission of single switch was measured as a function of coupler gap. Around a coupler gap of 110 nm, the switch-on state was obtained. The resonant frequency of the movable part of switch was about 162.3 kHz.

元の言語English
ホスト出版物のタイトルInternational Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
出版者IEEE Computer Society
ISBN(印刷物)9781509063727
DOI
出版物ステータスPublished - 2018 9 4
イベント23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland
継続期間: 2018 7 292018 8 2

出版物シリーズ

名前International Conference on Optical MEMS and Nanophotonics
2018-July
ISSN(印刷物)2160-5033
ISSN(電子版)2160-5041

Other

Other23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
Switzerland
Lausanne
期間18/7/2918/8/2

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • これを引用

    Nagai, T., & Hane, K. (2018). Silicon Adiabatic Waveguide Coupler Switch Using Lateral Comb Actuators. : International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings [8454556] (International Conference on Optical MEMS and Nanophotonics; 巻数 2018-July). IEEE Computer Society. https://doi.org/10.1109/OMN.2018.8454556