SiGe epitaxial growth and its atomic-layer control

Junichi Murota, Masao Sakuraba

研究成果: Article

元の言語English
ページ(範囲)8-12
ページ数5
ジャーナルShinku/Journal of the Vacuum Society of Japan
48
発行部数1
DOI
出版物ステータスPublished - 2005 1 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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