Si multiprobes integrated with lateral actuators for independent scanning probe applications

Silicon SPM multiprobes having lateral actuators with a very small pitch were microfabricated and evaluated for independent parallel operations and nanomaterial characterizations. Two types of 1 × 4 probe array were developed. In order to treat smaller objects, the distance between each cantilever tip was produced to be as small as possible. The inter-tip distance is about 7 νm. In addition, the cantilevers of the multiprobes had comb drive actuators that enable individual probes to move horizontally. More flexibility in SPM operation was obtained with these individual self-movement probes possibly opening up new applications in nanotechnology. Using the microfabricated multiprobes, the characterization of the electric properties of a carbon nanotube by a two-probe measurement and the manipulation of a microlens were demonstrated.