Short-range displacement detection from speckle interference using transparent thin-film photodiode

M. Sasaki, T. Hirano, X. Mi, K. Hane

研究成果: Article査読

3 被引用数 (Scopus)

抄録

Speckle interference in space was monitored by using a newly developed transparent thin-film photodiode, which was fabricated by micromachining techniques. Since the sensitive region of the developed photodiode was thinner than one-half of the wavelength, an optical standing wave generated by the interference between two waves propagating in opposite directions was detected. This photodiode was used in a short-range displacement measurement in a speckle field. Using the sinusoidal phase modulation technique, object displacement was sensed with an accuracy of about 30 nm in a speckle granular structure.

本文言語English
ページ(範囲)534-537
ページ数4
ジャーナルJournal of Optics A: Pure and Applied Optics
2
6
DOI
出版ステータスPublished - 2000 11

ASJC Scopus subject areas

  • 原子分子物理学および光学

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