Separation of electron-stimulated-desorption neutrals from outgassing originating from the grid surface of emission-controlled gauges: Studies with a heated-grid gauge

Fumio Watanabe, Maki Suemitsu

研究成果: Article査読

12 被引用数 (Scopus)

抄録

With the construction of a heated-grid gauge, whose grid temperature can be varied independent of the electron emission, the two major barriers against precise pressure measurements in the extremely high vacuum (XHV) region, i.e., electron-stimulated-desorption neutrals and outgassing, have been successfully separated. In XHV, these two processes are both dominated by hydrogen molecules, while their strengths depend strongly on the grid temperature and the grid material. At elevated temperatures, outgassing caused by the out-diffusion of hydrogen atoms dissolved in the grid begin to dominate. This suggests use of a metal with low hydrogen solubility for XHV-compatible grid material.

本文言語English
ページ(範囲)3467-3472
ページ数6
ジャーナルJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
17
6
DOI
出版ステータスPublished - 1999

ASJC Scopus subject areas

  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜

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