Selective mode excitation of piezoelectric disk-type resonator by electrodepattern definition

Takeshi Matsumura, Masayoshi Esashi, Hiroshi Harada, Florian Thalmayr, Ken Ya Hashimoto, Shuji Tanaka

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

Contour-mode piezoelectric MEMS resonators have been widely studied as oneof potential components for future multi-band RF solution based on cognitiveradio technology, because its resonant frequency is generally determined by thesize and shape. To apply them to applications at frequency of higher thanhundreds MHz, a specific higher mode should be strongly excited. However, it isoften difficult, because the higher order vibration is a compound mode includingradial and rotational displacements. In this study, the displacementdistributions of higher order wine-glass modes of disk-type resonators werederived from FEM modal analysis. Then, mechanically-coupled disk-array filterswith baseball-type and doughnut-type electrodes were fabricated and tested.Using the doughnut-type electrodes, (2. 6) mode was selectively excited, and afilter characteristic at a center frequency of 500.3 MHz was obtained. It wasnumerically and experimentally confirmed that a well-designed electrode patternenhanced a specific vibration mode and suppressed other modes by comparingdifferent electrode patterns.

本文言語English
ホスト出版物のタイトル2010 IEEE International Ultrasonics Symposium, IUS 2010
ページ979-982
ページ数4
DOI
出版ステータスPublished - 2010 12 1
イベント2010 IEEE International Ultrasonics Symposium, IUS 2010 - San Diego, CA, United States
継続期間: 2010 10 112010 10 14

出版物シリーズ

名前Proceedings - IEEE Ultrasonics Symposium
ISSN(印刷版)1051-0117

Other

Other2010 IEEE International Ultrasonics Symposium, IUS 2010
CountryUnited States
CitySan Diego, CA
Period10/10/1110/10/14

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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