Scanning nonlinear dielectric microscope with super high resolution

Yasuo Cho

研究成果: Article査読

10 被引用数 (Scopus)

抄録

Scanning nonlinear dielectric microscopy (SNDM) with super-high resolution is described. First, experimental results on the ferroelectric domain and visualization of charge stored in flash memories are shown following a description of the theory and principle of SNDM. Next, a higher-order nonlinear dielectric imaging method (HO-SNDM) and non contact SNDM (NC-SNDM) are proposed. Using NC-SNDM, the first achievement of atomic resolution in capacitance measurement is successfully demonstrated. In addition to these techniques, a new three-dimensional (3D)-type of SNDM for measuring the 3D distribution of ferroelectric polarization has been developed. Finally, a very high density ferroelectric data storage system based on SNDM with an actual information density of 1 Tbits/in.2 is demonstrated.

本文言語English
ページ(範囲)4428-4434
ページ数7
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
46
7 B
DOI
出版ステータスPublished - 2007 7 26

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

フィンガープリント 「Scanning nonlinear dielectric microscope with super high resolution」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル