Scanning nonlinear dielectric microscope with super high resolution

Yasuo Cho

研究成果: Article査読

12 被引用数 (Scopus)


Scanning nonlinear dielectric microscopy (SNDM) with super-high resolution is described. First, experimental results on the ferroelectric domain and visualization of charge stored in flash memories are shown following a description of the theory and principle of SNDM. Next, a higher-order nonlinear dielectric imaging method (HO-SNDM) and non contact SNDM (NC-SNDM) are proposed. Using NC-SNDM, the first achievement of atomic resolution in capacitance measurement is successfully demonstrated. In addition to these techniques, a new three-dimensional (3D)-type of SNDM for measuring the 3D distribution of ferroelectric polarization has been developed. Finally, a very high density ferroelectric data storage system based on SNDM with an actual information density of 1 Tbits/in.2 is demonstrated.

ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
7 B
出版ステータスPublished - 2007 7月 26

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)


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