Scanning Force Microscope using a Common-path Optical Heterodyne Interferometer

Motohito Hino, Minoru Sasaki, Kazuhiko Fujita, Yoshinori Bessho, Kazuhiro Hane, Shigeru Okuma

研究成果: Article査読

1 被引用数 (Scopus)

抄録

In this paper, the scanning force microscope (SFM) using optical heterodyne interferometry is reported. The birefringent double-focus lens was used as a beam splitter-recombiner, and thus, the two interfering beams passed through a common optical path and the reference plane of the interferometer was located on the sample surface. Therefore, the deflection of the cantilever was detected without being affected by the irregular movement of the stage and the environmental conditions, such as thermal and vibrational disturbances. Since the SFM system was combined with a laser interferometric microscope and a conventional optical microscope, the sample was positioned easily by the visual inspection, and it was measured by the laser interferometry.

本文言語English
ページ(範囲)1853-1858
ページ数6
ジャーナルJournal of the Japan Society for Precision Engineering
59
11
DOI
出版ステータスPublished - 1993
外部発表はい

ASJC Scopus subject areas

  • 機械工学

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