Scanning force microscope technique for adhesion distribution measurement

Minoru Sasaki, Kazuhiro Hane, Shigeru Okuma, Akihiro Torii

研究成果: Article査読

13 被引用数 (Scopus)

抄録

A scanning force microscope technique is described to study the relation between topography and the local adhesion. The drift has been a main problem in investigating this relation since a long period is required to measure force curves over the scan area. To circumvent this problem, we propose a methodology to detect the topography and the adhesion from force curves simultaneously. Since this information is obtained from the same force curve, the distribution of the tip position corresponds precisely to that of the adhesion. The detailed relation between the tip position and the adhesion is measured on a fine lithographic grating.

本文言語English
ページ(範囲)350-354
ページ数5
ジャーナルJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
13
2
DOI
出版ステータスPublished - 1995 3 1
外部発表はい

ASJC Scopus subject areas

  • 凝縮系物理学
  • 電子工学および電気工学

フィンガープリント

「Scanning force microscope technique for adhesion distribution measurement」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル