Studies on scanning electron-beam dielectric microscopy (SEDM) are reported. This microscopy technique is used for determining the temperature coefficient distribution of dielectric materials using an electron-beam as a heat source instead of a light beam as in photothermal dielectric microscopy. This microscopy technique, which has the ability to simultaneously observe SEM images and the material composition by EPMA, has a resolution better than that of photothermal dielectric microscopy. To demonstrate the usefulness of this technique, the two-dimensional image of a two-phase composite ceramic composed of TiO2 and Bi2Ti4O11 is measured. To shorten a measurement time, a new type of SEDM for measuring the real time transient response caused by a single pulsed electron-beam is also successfully developed. Finally, a quantitative measurement method of temperature coefficient is also developed.
|ジャーナル||Materials Research Society Symposium - Proceedings|
|出版ステータス||Published - 2002 1月 1|
|イベント||Combinatorial and Artificial Intelligence Methods in Materials Science - Boston, MA, United States|
継続期間: 2001 11月 26 → 2001 11月 29
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