Scanning diamond probe and application to thermo-mechanical nanolithography

Joon Hyung Bae, Takahito Ono, Chihiro Konoma, Masayoshi Esashi

研究成果: Paper査読

1 被引用数 (Scopus)

抄録

This paper describes the fabrication, evaluation and application of a boron-doped diamond micro-probe with an integrated resistive heater element. The diamond heater with a pyramidal tip, which is bridged at the end of two diamond beams, can be electrically heated by flowing a DC or AC current. The high thermal conductivity of the diamond base supporting the heater element allows a very quick thermal response of 0.45 μsec. The hard-wearing sharp diamond tip formed by silicon-lost mold technique shows excellent durability in contact operation with a sample. Demonstration of thermo-mechanical nanolithography with this heated probe exhibits line patterns with the feature size of 40 nm on a Polymethylmethacrylate (PMMA) film and transferred pits-pattern with the diameter of 230 nm and the pitch of 400 nm onto a silicon substrate.

本文言語English
ページ24-27
ページ数4
出版ステータスPublished - 2003 7 23
イベントIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan
継続期間: 2003 1 192003 1 23

Other

OtherIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
国/地域Japan
CityKyoto
Period03/1/1903/1/23

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 機械工学
  • 電子工学および電気工学

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