This paper describes the fabrication, evaluation and application of a boron-doped diamond micro-probe with an integrated resistive heater element. The diamond heater with a pyramidal tip, which is bridged at the end of two diamond beams, can be electrically heated by flowing a DC or AC current. The high thermal conductivity of the diamond base supporting the heater element allows a very quick thermal response of 0.45 μsec. The hard-wearing sharp diamond tip formed by silicon-lost mold technique shows excellent durability in contact operation with a sample. Demonstration of thermo-mechanical nanolithography with this heated probe exhibits line patterns with the feature size of 40 nm on a Polymethylmethacrylate (PMMA) film and transferred pits-pattern with the diameter of 230 nm and the pitch of 400 nm onto a silicon substrate.
|出版ステータス||Published - 2003 7 23|
|イベント||IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan|
継続期間: 2003 1 19 → 2003 1 23
|Other||IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems|
|Period||03/1/19 → 03/1/23|
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