Saving energy and natural resource by micro-nanomachining

Masayoshi Esashi

研究成果: Paper査読

4 被引用数 (Scopus)

抄録

Micro-nanomachining technologies have been studied with the aim of saving energy and natural resources. Wafer process packaging using electrical feedthrough in glass has been applied to micromechanical sensors as electrostatically levitating micro motors (10,000 rpm) for rotational gyroscopes. Maintenance tools as active catheters have been developed to be used in narrow space for extended life. Technologies for compact power source as fabrication of ceramic microstructures using silicon mold and as measurement of hydrogen storage capacity of carbon nanotube were developed.

本文言語English
ページ220-227
ページ数8
出版ステータスPublished - 2002 1月 1
イベント15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States
継続期間: 2002 1月 202002 1月 24

Other

Other15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
国/地域United States
CityLas Vegas, NV
Period02/1/2002/1/24

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 機械工学
  • 電子工学および電気工学

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