Rh-nanoparticle-dispersed ZrO 2 films prepared by laser chemical vapor deposition

Akihiro Honda, Teiichi Kimura, Akihiko Ito, Takahi Goto

研究成果: Article査読

5 被引用数 (Scopus)

抄録

Rhodium-nanoparticle-dispersed zirconia (Rh/ZrO 2) films were prepared by laser chemical vapor deposition using Rh and Zr dipivaloylmethanate precursors. The effects of deposition conditions and heat treatment on the microstructures of ZrO 2 and Rh/ZrO 2 films were investigated. At a deposition temperature of 1180K and a Rh to Zr source molar ratio (R Rh/Zr) of 0.05, Rh nanoparticles precipitated on the surface of a (020)-oriented ZrO 2 matrix having a feather-like structure. The diameter of the Rh nanoparticles increased from 25 to 70nm as R Rh/Zr increased from 0.01 to 0.10. The microstructure of the Rh nanoparticles and the feather-like structure of the ZrO 2 matrix were unchanged after heat treatment at 873K in air for 10h.

本文言語English
ページ(範囲)3006-3010
ページ数5
ジャーナルSurface and Coatings Technology
206
11-12
DOI
出版ステータスPublished - 2012 2 15

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜
  • 材料化学

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