Revolution of sensors in micro-electromechanical systems

Masayoshi Esashi

研究成果: Review article査読

27 被引用数 (Scopus)

抄録

Microsensors realized by micro-electromechanical systems (MEMS) technology play a key role as the input devices of systems. In this report, the following sensors are reviewed: piezoresistive and capacitive pressure sensors, surface acoustic wave (SAW) wireless pressure sensors, tactile sensor networks for robots, accelerometers, angular velocity sensors (gyroscopes), range image sensors using optical scanners, infrared imagers, chemical sensing systems as Fourier transform infrared (FTIR) spectroscopy and gas chromatography, flow sensors for fluids, and medical sensors such as ultrafine optical-fiber blood pressure sensors and implantable pressure sensors.

本文言語English
論文番号080001
ジャーナルJapanese journal of applied physics
51
8 PART 1
DOI
出版ステータスPublished - 2012 8月

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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